New Process

Machines by Lab: TRL

TRL is mainly the 4th floor of bldg 39, with some exceptions
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
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TRL A1-GateOx DiffusionOxidation Thermal Oxidation for Green Silicon Wafers
Green
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TRL A2-WetOxBond DiffusionOxidation Thermal Oxidation and other thermal process for GREEN Si wafers
Green
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TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
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TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
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TRL acid-hood WetAcids Acid processing station
Red &Green
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TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
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TRL asherMatrix-TRL PhotoClean Single wafer oxygen plasma for photoresist removal
Red
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TRL asher-TRL PhotoClean Barrel asher for resist removal
Red &Green
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TRL B1-Au DiffusionOxidation Gold compatible anneal tube
Red
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TRL B2-Ox-alloy-Poly DiffusionOxidation Thermal Oxidation and LPCVD Polysilicon for RED wafers
Green
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TRL B3-DryOx DiffusionOxidation Thermal Oxidation
Green
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TRL B4-Poly DiffusionCVD LPCVD polysilicon for Green wafers
Green
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TRL Balzer-Elionix DepositionSputter SEM or EBL sample preparation
Red
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TRL CCNT DepositionPECVD Carbon nanotube growth
Red
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TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
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TRL dek-NoAu MetrologyProfile Stylus Profilerometer
Green
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TRL dektak-XT MetrologyProfile Stylus Profilerometer
Red
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TRL develop-Brewer PhotoCoat Resist develop and postbake
Red &Green
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TRL eBeamAu DepositionEvaporate Metal evaporator
Red
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TRL eBeamFP DepositionEvaporate Fast pumping metal evaporator
Red
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TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL EV501 PhotoBond Bonder system to apply heat, vacuum and pressure
Red &Green
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TRL EV620 PhotoBond Aligner for bonding
Red &Green
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TRL EV-LC PhotoExpose Contact mask aligner
Red &Green
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TRL Filmetrics-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL FLX MetrologyProfile Thin film stress measurement
Red &Green
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TRL Greenflo WetAcids Acid processing station
Red &Green
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TRL Hall-probe MetrologyElectrical Carrier measurement
Red
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TRL Heidelberg PhotoExpose Laser direct-write exposure for wafers and masks
Red &Green
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TRL HMDS-TRL PhotoBake HMDS oven
Red &Green
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TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
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TRL IV-probe MetrologyElectrical Probe station with curve tracer for IV measurement
Red
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TRL LAM590-TRL EtchRIE Fluorine based plasma etching of oxide and nitrides
Red
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TRL DirectWrite-MLA150-OptAF PhotoExpose Direct-write lithography for wafers and larger pieces
Red &Green
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TRL DirectWrite-MLA150-AirAF PhotoExpose Direct-write lithography for wafers and larger pieces
Red &Green
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TRL nanospec MetrologyThickness Thin film thickness measurement
Red &Green
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TRL OAI-Flood PhotoExpose Flood exposure for image reversal resists
Red &Green
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TRL parylene DepositionCVD Parylene depopsition
Red
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TRL photo-wet-Au WetSolvents Solvent fume hood with sonicator
Red &Green
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TRL photo-wet-l WetSolvents Wetbench for photoresist development
Red &Green
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TRL photo-wet-r WetSolvents Wetbench for photoresist development
Red &Green
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TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
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TRL PMMAspinner PhotoCoat Manual coater for PMMA and other photoresists
Red &Green
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TRL postbake PhotoBake Bake oven 120C
Red &Green
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TRL prebakeovn PhotoBake Bake oven 90C
Red &Green
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TRL PZTcoater DepositionSpin-Coat Coater to apply PZT films
Red
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TRL PZTfurnace DepositionBake Bake oven for PZT coated wafers
Red
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TRL rca-TRL DiffusionClean Wafer cleaning before diffusion tubes
Green
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TRL Resonetics PhotoExpose Laser ablation system
Red
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TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
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TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red
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TRL SolventHood-TRL WetSolvents Solvent fume hood
Red &Green
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TRL sts1 EtchDRIE Deep reactive ion etcher for silicon
Red
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TRL sts2 EtchDRIE Deep reactive ion etcher for silicon
Green
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TRL sts-CVD DepositionPECVD PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red
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TRL sts-Pegasus EtchDRIE Deep reactive ion etcher for silicon
Red
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TRL SU8oven PhotoBake Oven to dry foil from SU8 coater
Purple
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TRL SU8spinner PhotoCoat Manual spin-coater for SU8 resists
Purple
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TRL TBM-8 PhotoBond Front-to-back alignement measurement
Red &Green
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TRL UVozone-Au EtchClean Cleans residual organics
Red
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TRL varTemp PhotoBake Bake oven for variable temperature
Red
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TRL WYKO MetrologyProfile Optical profiling system
Red &Green
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TRL XeF2 EtchRIE XeF2 isotropic etching of silicon
Red