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Machines by Lab: NANO

Building 12 Fab.nano
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
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NANO Anneal-Tube DiffusionBake Anneal Furnace
Red
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NANO Asher-SoftLitho Photo, SoftLithoClean, PDMS Oxygen Plasma
Red
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NANO Sputter-Balzer DepositionSputter Thin sputter coating of samples
Red
  +  
NANO Anneal-Box DiffusionBake Anneal Furnace
Red
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NANO Dektak-150 Metrology, SoftLithoProfile, SU8 Surface Profilerometer
Red
  +  
NANO EBeam-AJA DepositionEvaporate Metal and dielectric evaporator
Red
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NANO Filmetrics-F20 MetrologyThickness Thin Film Optical Measurement
Red &Green
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NANO Ox-Tube-Lindberg DiffusionOxidation Oxidation Furnace
EML
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NANO RTA-900C DiffusionBake Rapid Thermal Annealing
Red
  +  
NANO SEM-Neo MetrologySEM Very Basic Electron Microscope
Red
  +  
NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
  +  
NANO Vacuum-Oven DiffusionBake Temperature controlled vacuum oven
Red
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NANO Diesaw-DAD3240 PackagingPhysical Wafer dicing saw
Red
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NANO CMP-GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
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NANO Wirebond-Ball-MEI PackagingPhysical Gold ball bonder for device packaging
Red
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NANO MaskAlign-SoftLitho-EV620 Photo, SoftLithoExpose, SU8 Contact mask aligner
Red &Green
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NANO MaskAlign-MA6 PhotoExpose Contact mask aligner
Red &Green
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NANO Wirebond-Auto PackagingPhysical, LEAP Automated wirebonder
Red
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NANO Wirebond-Ball-Westbond PackagingPhysical, LEAP Manual ball bonder
Red
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NANO Wirebond-Wedge PackagingPhysical, LEAP Manual wedge bonder
Red
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NANO XRay-Inspection PackagingPhysical, LEAP X-Ray imaging
Red
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NANO DieBonder-PickAndPlace PackagingPhysical, LEAP Automated pick and place
Red
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NANO Clean-Ar-Plasma PackagingClean, LEAP Plasma parts cleaning
Red
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NANO Oven-Reflow PackagingBake, LEAP Reflow oven
Red
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NANO Microscope-QuickVision PackagingPhysical, LEAP Automated imaging microscope
Red
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NANO Freezer-Packaging PackagingPhysical, LEAP 0
Red
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NANO Interference-LloydsMirror LithoExpose 0
Red &Green
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NANO AIR_Bladecoater NanoMatTBD 0
Red
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NANO AIR_FOM NanoMatTBD 0
Red
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NANO AIR_Spincoater NanoMatTBD 0
Red
  +  
NANO GB_Solar_Sim NanoMatTBD 0
Red
  +  
NANO GB_Spincoater NanoMatTBD 0
Red
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NANO GB_Metals_Evaporator NanoMatTBD 0
Red
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NANO GB_Organics_Evaporator NanoMatTBD 0
Red
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NANO Agilent5500_AFM NanoMatTBD 0
Red
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NANO Cary_UV-Vis_Spec NanoMatTBD 0
Red
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NANO Fluorescence_Spec NanoMatTBD 0
Red
  +  
NANO 4_Point_Probe NanoMatTBD 0
Red
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NANO PECVD-Samco-PD220 DepositionPECVD Silicon dielectric PECVD deposition
Red &Green
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NANO RIE-F-Samco-230iP EtchRIE Fluorine based etcher for silicon dielectrics
Red &Green
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NANO Coldplate-Solvent LithoDevelop Coldplate for PMMA developing
Red &Green
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NANO Hotplate-Tower-U10 LithoBake Hotplate tower for pre- and post-baking, up to 300 mm
Red &Green
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NANO Hotplate-Tower-U12 LithoBake Hotplate tower for pre- and post-baking, up to 150 mm
Red &Green
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NANO Oven-PostBake-U10 LithoBake Oven for 120C postbake of photoresists
Red &Green
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NANO Oven-PostBake-U12 LithoBake Oven for 120C postbake of photoresists
Red &Green
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NANO Oven-PreBake-U10 LithoBake Oven for 97C prebake of photoresists
Red &Green
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NANO Oven-PreBake-U12 LithoBake Oven for 97C prebake of photoresists
Red &Green
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NANO Spinner-AllPurpose LithoCoat All purpose spinner for user-supplied resist and small samples
Red &Green
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NANO Spinner-EBL LithoCoat Spinner for white-light compatible ebeam litho resists PMMA and HSQ
Red &Green
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NANO Spinner-Resist LithoCoat Wafer and large pieces spinner with three plumbed resists
Red &Green
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NANO Develop-L08 LithoDevelop Fumehood for resist developing
Red &Green
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NANO Develop-U10 LithoDevelop Fumehood for resist developing
Red &Green
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NANO Develop-U12 LithoDevelop Fumehood for resist developing
Red &Green
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NANO EBL-Spinner-Hood-U06 LithoCoat Solvent fumehood for EBL coating and sample cleaning
Red &Green
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NANO General-Spinner-Hood-U12 LithoCoat Solvent fumehood for spin coating
Red &Green
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NANO Liftoff-L08 LithoClean General purpose solvent hood and liftoff procedures
Red &Green
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NANO Liftoff-L10 LithoClean General purpose solvent hood and liftoff procedures
Red &Green
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NANO PhotoPrep-L10 LithoTBD Solvent fumehood for general purpose lithography preparation
Red &Green
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NANO Resist-Spinner-Hood-U10 LithoCoat Solvent fumehood for spin coating
Red &Green
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NANO Microscope-Inspect-4k MetrologyInspect Inspection microscope with 4k camera, DIC, darkfield, up to 100x objectives
Red &Green
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NANO Microscope-Inspect-HD MetrologyInspect Inspection microscope with HD camera, up to 100x objectives
Red &Green
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NANO Cleave-LatticeAx MetrologyCleave Aligned sample cleaver for precision indenting and cleaving
Red &Green
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NANO Scribe-Backside MetrologyCleave Sample backside scribing tool
Red &Green
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NANO Scribe-Frontside MetrologyCleave Sample frontside scribing tool
Red &Green
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NANO Microscope-Stereo-Packaging MetrologyPhysical Stereoscope for packaging inspection and work
Red &Green
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NANO Solder-Station PackagingPhysical Solder station for surface mount and rework
Red &Green
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NANO Microscope-Stereo-SU8 SoftLithoSU8, Microscope Stereoscope for placing/peeling/cutting of PDMS
Purple
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NANO Mixer-PDMS-Degas SoftLithoPDMS, Mixer Centrifugal mixer for PDMS
Purple
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NANO Oven-PDMS SoftLithoPDMS, Bake Oven for curing PDMS
Purple
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NANO PDMS-Prep SoftLithoPDMS, Fumehood Fumehood for mixing and casting PDMS
Purple
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NANO SoftLitho-Develop SoftLithoSU8, Fumehood SU8 hood for baking
Purple
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NANO SoftLitho-Prep SoftLithoPDMS, Fumehood Fumehood for cleaning and preparing samples for SU8 and PDMS work
Purple
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NANO Spinner-SU8 SoftLithoSU8, Coat SU8 spin coater with plumbed developer/rinse/ebr
Purple
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NANO SU8-Spinner-Hood SoftLithoSU8, Fumehood Fumehood for SU8 spinning and solvent work
Purple
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NANO SRD-L06 WetClean Spin rinse drier for 4, 6, and 8 inch wafers
Red &Green
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NANO SRD-U10 WetClean Spin rinse drier for 4, 6, and 8 inch wafers
Red &Green
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NANO Acid-Etch-General-U10 WetEtch Acid hood for general purpose acid work
Red &Green
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NANO Acid-Extended-U07 WetEtch Acid hood for longer runs
Red &Green
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NANO Acid-PostCMP-U07 WetClean Acid hood for post-CMP sample cleaning
Red &Green
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NANO Acid-PreClean-U06 WetClean Acid bench for RCA and piranha cleaning of up to 6 inch wafers
Red &Green
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NANO NitrideEtch-Phos-L06 WetEtch Acid bench for etching Si3N4 in hot phosphoric acid
Red &Green
  +  
NANO OxideEtch-HF-BOE-L06 WetEtch Acid bench for etching SiO2 in BOE and HF
Red &Green
  +  
NANO Piranha-L06 WetClean Acid bench for piranha cleaning
Red &Green
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NANO Piranha-U10 WetClean Acid bench for piranha cleaning
Red &Green
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NANO Plating-U04 WetTBD Electroplating wet bench and fume hood
Red &Green
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NANO RCA-Diffusion-L02 WetClean Acid bench for RCA cleaning before diffusion
Red &Green
  +  
NANO RCA-General-L06 WetClean Acid bench for RCA cleaning
Red &Green
  +  
NANO SiliconEtch-KOH-L06 WetEtch Corrosive bench for Si etching with KOH
Red &Green
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NANO Solvent-Clean-U06 WetClean Solvent fumehood for sample cleaning including megasonic and CO2
Red &Green
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NANO Solvent-L06 WetClean Solvent hood for general purpose solvent work
Red &Green
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NANO Ops-ParticleCounter WetClean Particle Counter for staff use
Red &Green
  +  
NANO Computers WetClean Desktop computers in the lab
Red &Green