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Machines by Lab: ICL

ICL is mainly the 2nd floor of bldg 39, with some exceptions
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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ICL 4-pt-probe MetrologyElectrical Sheet resistance measurement of semiconductors
Red
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ICL 5A-GateOx DiffusionOxidation Diffusion tube for gate oxide growth
Green
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ICL 5B-Anneal DiffusionBake Annealing tube
Green
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ICL 5C-FieldOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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ICL 5D-ThickOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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ICL 6A-nPoly DiffusionCVD Polysilicon deposition tube for n-type poly Si
Green
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ICL 6B-Poly DiffusionCVD Polysilicon deposition tube for p-type poly Si
Green
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ICL 6C-LTO DiffusionCVD Low temperature CVD oxide deposition
Green
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ICL 6D-Nitride DiffusionCVD Deposition of stoichiometric silicon nitride
Green
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ICL AFM MetrologyProfile Atomic Force Microscope for Surface Analysis
Red &Green
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ICL ALD DepositionCVD Atomic Layer Deposition
Red
  +  
ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
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ICL AME5000 EtchRIE RIE etcher for frontend silicon processes
Green
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ICL asher-ICL PhotoClean Single wafer oxygen plasma for photoresist removal
Green
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ICL pTrack PhotoCoat Automated coater and developer track
Green
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ICL concept1 DepositionPECVD PECVD deposition of oxides, nitrides, and TEOS
Green
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ICL cv MetrologyElectrical Electrical characterization of dielectrics
Green
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ICL DCVD DepositionPECVD PECVD deposition of oxides, nitrides, and a-Si
Green
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ICL diesaw PackagingPhysical Wafer dicing saw
Red
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ICL eBeam-EVO DepositionEvaporate Metal evaporator of CMOS compatible metals
Green
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ICL endura DepositionSputter Metal sputter deposition
Green
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ICL epi-Centura DepositionCVD Not open to public
Green
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ICL i-stepper PhotoExpose i-line stepper
Red &Green
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ICL LAM490B EtchRIE Chlorine based plasma etching of silicon
Green
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ICL LAM590-ICL EtchRIE Fluorine based plasma etching of silicon oxide and nitrides
Green
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ICL nitrEtch-HotPhos WetAcids Hot phosphoric nitride etch bath
Green
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ICL oxEtch-BOE WetAcids Silicon dioxide etch bath
Green
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ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
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ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
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ICL P10 MetrologyProfile Stylus profilerometer
Green
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ICL premetal-Piranha WetAcids Piranha resist removal and cleaning station
Green
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ICL rainbow EtchRIE Chlorine based plasma etcher for metals
Green
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ICL rca-ICL DiffusionClean Wafer cleaning before diffusion tubes
Green
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ICL RTA2 DiffusionBake Rapid Thermal Annealing
Green
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ICL RTA-pieces DiffusionBake Rapid Thermal Annealing
Red
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ICL RTP DiffusionBake Rapid Thermal Annealing
Green
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ICL RTP-Si DiffusionBake Rapid Thermal Annealing
Green
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ICL semZeiss MetrologySEM Scanning Electron Microscope
Red &Green
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ICL SM-300 MetrologyThickness Thickness measurement for CMP processing
Red &Green
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ICL TMAH-KOHhood WetAcids Silicon bulk wet etching
Red &Green
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ICL UV1280 MetrologyThickness Thin film characterization
Green
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ICL VTR DiffusionCVD Low stress silicon nitride deposition
Green
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ICL wykoICL MetrologyProfile Optical profiling system
Green