New Process

Machines by General Keyword: temperature

The tool has the ability to heat up (or possibly cool down) the wafer, often through a heated chuck or other temperature controlled environment.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
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NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
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NANO Anneal-Tube DiffusionBake Anneal Furnace
Red
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NANO Anneal-Box DiffusionBake Anneal Furnace
Red
  +  
EML hotpress PhotoBond Pressing for thermoplastic films
EML
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NANO Ox-Tube-Lindberg DiffusionOxidation Oxidation Furnace
EML
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EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
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NANO RTA-900C DiffusionBake Rapid Thermal Annealing
Red
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NANO Vacuum-Oven DiffusionBake Temperature controlled vacuum oven
Red
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TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
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ICL 5A-GateOx DiffusionOxidation Diffusion tube for gate oxide growth
Green
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ICL 5B-Anneal DiffusionBake Annealing tube
Green
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ICL 5C-FieldOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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ICL 5D-ThickOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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ICL 6A-nPoly DiffusionCVD Polysilicon deposition tube for n-type poly Si
Green
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ICL 6B-Poly DiffusionCVD Polysilicon deposition tube for p-type poly Si
Green
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ICL 6C-LTO DiffusionCVD Low temperature CVD oxide deposition
Green
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ICL 6D-Nitride DiffusionCVD Deposition of stoichiometric silicon nitride
Green
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ICL ALD DepositionCVD Atomic Layer Deposition
Red
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ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
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ICL asher-ICL PhotoClean Single wafer oxygen plasma for photoresist removal
Green
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ICL pTrack PhotoCoat Automated coater and developer track
Green
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ICL concept1 DepositionPECVD PECVD deposition of oxides, nitrides, and TEOS
Green
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ICL DCVD DepositionPECVD PECVD deposition of oxides, nitrides, and a-Si
Green
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ICL epi-Centura DepositionCVD Not open to public
Green
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NANO Wirebond-Ball-MEI PackagingPhysical Gold ball bonder for device packaging
Red
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ICL nitrEtch-HotPhos WetAcids Hot phosphoric nitride etch bath
Green
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ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
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ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
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ICL premetal-Piranha WetAcids Piranha resist removal and cleaning station
Green
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ICL rca-ICL DiffusionClean Wafer cleaning before diffusion tubes
Green
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ICL RTA2 DiffusionBake Rapid Thermal Annealing
Green
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ICL RTA-pieces DiffusionBake Rapid Thermal Annealing
Red
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ICL RTP DiffusionBake Rapid Thermal Annealing
Green
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ICL RTP-Si DiffusionBake Rapid Thermal Annealing
Green
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ICL TMAH-KOHhood WetAcids Silicon bulk wet etching
Red &Green
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ICL VTR DiffusionCVD Low stress silicon nitride deposition
Green
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TRL A1-GateOx DiffusionOxidation Thermal Oxidation for Green Silicon Wafers
Green
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TRL A2-WetOxBond DiffusionOxidation Thermal Oxidation and other thermal process for GREEN Si wafers
Green
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TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
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TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
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TRL acid-hood WetAcids Acid processing station
Red &Green
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TRL B1-Au DiffusionOxidation Gold compatible anneal tube
Red
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TRL B2-Ox-alloy-Poly DiffusionOxidation Thermal Oxidation and LPCVD Polysilicon for RED wafers
Green
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TRL B3-DryOx DiffusionOxidation Thermal Oxidation
Green
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TRL B4-Poly DiffusionCVD LPCVD polysilicon for Green wafers
Green
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TRL CCNT DepositionPECVD Carbon nanotube growth
Red
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TRL EV501 PhotoBond Bonder system to apply heat, vacuum and pressure
Red &Green
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TRL FLX MetrologyProfile Thin film stress measurement
Red &Green
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TRL Greenflo WetAcids Acid processing station
Red &Green
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TRL HMDS-TRL PhotoBake HMDS oven
Red &Green
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TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
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TRL parylene DepositionCVD Parylene depopsition
Red
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TRL postbake PhotoBake Bake oven 120C
Red &Green
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TRL prebakeovn PhotoBake Bake oven 90C
Red &Green
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TRL PZTfurnace DepositionBake Bake oven for PZT coated wafers
Red
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TRL rca-TRL DiffusionClean Wafer cleaning before diffusion tubes
Green
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TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
  +  
TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red
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TRL SolventHood-TRL WetSolvents Solvent fume hood
Red &Green
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TRL sts-CVD DepositionPECVD PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red
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TRL sts-Pegasus EtchDRIE Deep reactive ion etcher for silicon
Red
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TRL SU8oven PhotoBake Oven to dry foil from SU8 coater
Purple
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TRL varTemp PhotoBake Bake oven for variable temperature
Red
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NANO Wirebond-Auto PackagingPhysical, LEAP Automated wirebonder
Red
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NANO Wirebond-Ball-Westbond PackagingPhysical, LEAP Manual ball bonder
Red
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NANO Wirebond-Wedge PackagingPhysical, LEAP Manual wedge bonder
Red
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NANO Clean-Ar-Plasma PackagingClean, LEAP Plasma parts cleaning
Red
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NANO Oven-Reflow PackagingBake, LEAP Reflow oven
Red