New Process

Machines by General Keyword: spinning substrate

The sample is being rotated on a chuck, usually when coating. Important to be aware of if the sample is small, oddly shaped, or fragile.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML coater-EML PhotoCoat Photoresist Coater
EML
  +  
ICL pTrack PhotoCoat Automated coater and developer track
Green
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NANO CMP-GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
  +  
TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
  +  
TRL develop-Brewer PhotoCoat Resist develop and postbake
Red &Green
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TRL PMMAspinner PhotoCoat Manual coater for PMMA and other photoresists
Red &Green
  +  
TRL PZTcoater DepositionSpin-Coat Coater to apply PZT films
Red
  +  
TRL SU8spinner PhotoCoat Manual spin-coater for SU8 resists
Purple