New Process

Machines by General Keyword: single wafer

Only one wafer can be processed by the tool (that is, no cassettes or batch processing possible)
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EBL Elionix PhotoExpose Electron beam lithography system
Red &Green
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
  +  
NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
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NANO Asher-SoftLitho Photo, SoftLithoClean, PDMS Oxygen Plasma
Red
  +  
EML coater-EML PhotoCoat Photoresist Coater
EML
  +  
NANO Dektak-150 Metrology, SoftLithoProfile, SU8 Surface Profilerometer
Red
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NANO EBeam-AJA DepositionEvaporate Metal and dielectric evaporator
Red
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NANO Filmetrics-F20 MetrologyThickness Thin Film Optical Measurement
Red &Green
  +  
EML hotpress PhotoBond Pressing for thermoplastic films
EML
  +  
EML parametric-tester MetrologyElectrical Probe station for electrical measurements
EML
  +  
EML photo-hood-EML WetSolvents Solvent Fume hood for lithography
EML
  +  
EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
  +  
NANO RTA-900C DiffusionBake Rapid Thermal Annealing
Red
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NANO SEM-Neo MetrologySEM Very Basic Electron Microscope
Red
  +  
EML SolventHood-EML WetSolvents Solvent Fume hood for lithography
EML
  +  
NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
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TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
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ICL 4-pt-probe MetrologyElectrical Sheet resistance measurement of semiconductors
Red
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ICL AFM MetrologyProfile Atomic Force Microscope for Surface Analysis
Red &Green
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ICL ALD DepositionCVD Atomic Layer Deposition
Red
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ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
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ICL cv MetrologyElectrical Electrical characterization of dielectrics
Green
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ICL diesaw PackagingPhysical Wafer dicing saw
Red
  +  
NANO Diesaw-DAD3240 PackagingPhysical Wafer dicing saw
Red
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NANO CMP-GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
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ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
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ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
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ICL P10 MetrologyProfile Stylus profilerometer
Green
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ICL RTA2 DiffusionBake Rapid Thermal Annealing
Green
  +  
ICL RTA-pieces DiffusionBake Rapid Thermal Annealing
Red
  +  
ICL semZeiss MetrologySEM Scanning Electron Microscope
Red &Green
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ICL SM-300 MetrologyThickness Thickness measurement for CMP processing
Red &Green
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ICL wykoICL MetrologyProfile Optical profiling system
Green
  +  
TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
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TRL CCNT DepositionPECVD Carbon nanotube growth
Red
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TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
  +  
TRL dek-NoAu MetrologyProfile Stylus Profilerometer
Green
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TRL dektak-XT MetrologyProfile Stylus Profilerometer
Red
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TRL develop-Brewer PhotoCoat Resist develop and postbake
Red &Green
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TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
  +  
NANO MaskAlign-SoftLitho-EV620 Photo, SoftLithoExpose, SU8 Contact mask aligner
Red &Green
  +  
TRL EV501 PhotoBond Bonder system to apply heat, vacuum and pressure
Red &Green
  +  
TRL EV620 PhotoBond Aligner for bonding
Red &Green
  +  
TRL EV-LC PhotoExpose Contact mask aligner
Red &Green
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TRL Filmetrics-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL FLX MetrologyProfile Thin film stress measurement
Red &Green
  +  
TRL Hall-probe MetrologyElectrical Carrier measurement
Red
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TRL Heidelberg PhotoExpose Laser direct-write exposure for wafers and masks
Red &Green
  +  
TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
  +  
TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
  +  
TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
  +  
TRL IV-probe MetrologyElectrical Probe station with curve tracer for IV measurement
Red
  +  
NANO MaskAlign-MA6 PhotoExpose Contact mask aligner
Red &Green
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TRL DirectWrite-MLA150-OptAF PhotoExpose Direct-write lithography for wafers and larger pieces
Red &Green
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TRL DirectWrite-MLA150-AirAF PhotoExpose Direct-write lithography for wafers and larger pieces
Red &Green
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TRL nanospec MetrologyThickness Thin film thickness measurement
Red &Green
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TRL OAI-Flood PhotoExpose Flood exposure for image reversal resists
Red &Green
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TRL parylene DepositionCVD Parylene depopsition
Red
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TRL photo-wet-Au WetSolvents Solvent fume hood with sonicator
Red &Green
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TRL photo-wet-l WetSolvents Wetbench for photoresist development
Red &Green
  +  
TRL photo-wet-r WetSolvents Wetbench for photoresist development
Red &Green
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TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
  +  
TRL PMMAspinner PhotoCoat Manual coater for PMMA and other photoresists
Red &Green
  +  
TRL PZTcoater DepositionSpin-Coat Coater to apply PZT films
Red
  +  
TRL PZTfurnace DepositionBake Bake oven for PZT coated wafers
Red
  +  
TRL Resonetics PhotoExpose Laser ablation system
Red
  +  
TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
  +  
TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red
  +  
TRL SolventHood-TRL WetSolvents Solvent fume hood
Red &Green
  +  
TRL sts1 EtchDRIE Deep reactive ion etcher for silicon
Red
  +  
TRL sts2 EtchDRIE Deep reactive ion etcher for silicon
Green
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TRL sts-CVD DepositionPECVD PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red
  +  
TRL SU8spinner PhotoCoat Manual spin-coater for SU8 resists
Purple
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TRL TBM-8 PhotoBond Front-to-back alignement measurement
Red &Green
  +  
TRL UVozone-Au EtchClean Cleans residual organics
Red
  +  
TRL WYKO MetrologyProfile Optical profiling system
Red &Green
  +  
TRL XeF2 EtchRIE XeF2 isotropic etching of silicon
Red