New Process

Machines by General Keyword: requires flat

Some tools require wafers to have a flat, and cannot process flat-free wafers
View All

ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
ICL DCVD DepositionPECVD PECVD deposition of oxides, nitrides, and a-Si
Green
  +  
ICL endura DepositionSputter Metal sputter deposition
Green
  +  
ICL epi-Centura DepositionCVD Not open to public
Green
  +  
ICL i-stepper PhotoExpose i-line stepper
Red &Green
  +  
ICL rainbow EtchRIE Chlorine based plasma etcher for metals
Green
  +  
ICL RTP DiffusionBake Rapid Thermal Annealing
Green
  +  
ICL RTP-Si DiffusionBake Rapid Thermal Annealing
Green
  +  
ICL UV1280 MetrologyThickness Thin film characterization
Green
  +  
TRL FLX MetrologyProfile Thin film stress measurement
Red &Green
  +  
TRL sts-Pegasus EtchDRIE Deep reactive ion etcher for silicon
Red