New Process

Machines by General Keyword: manual operation

The tool is operated manually, and the usuer needs to be in attendance for most of the key steps (e.g. pressing buttons or making decisions). With these tools, you can't go off to take a nap.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EBL Elionix PhotoExpose Electron beam lithography system
Red &Green
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
  +  
NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
  +  
NANO Anneal-Tube DiffusionBake Anneal Furnace
Red
  +  
NANO Asher-SoftLitho Photo, SoftLithoClean, PDMS Oxygen Plasma
Red
  +  
NANO Sputter-Balzer DepositionSputter Thin sputter coating of samples
Red
  +  
NANO Anneal-Box DiffusionBake Anneal Furnace
Red
  +  
EML coater-EML PhotoCoat Photoresist Coater
EML
  +  
NANO Dektak-150 Metrology, SoftLithoProfile, SU8 Surface Profilerometer
Red
  +  
NANO EBeam-AJA DepositionEvaporate Metal and dielectric evaporator
Red
  +  
NANO Filmetrics-F20 MetrologyThickness Thin Film Optical Measurement
Red &Green
  +  
EML hotpress PhotoBond Pressing for thermoplastic films
EML
  +  
NANO Ox-Tube-Lindberg DiffusionOxidation Oxidation Furnace
EML
  +  
EML parametric-tester MetrologyElectrical Probe station for electrical measurements
EML
  +  
EML photo-hood-EML WetSolvents Solvent Fume hood for lithography
EML
  +  
NANO RTA-900C DiffusionBake Rapid Thermal Annealing
Red
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NANO SEM-Neo MetrologySEM Very Basic Electron Microscope
Red
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EML SolventHood-EML WetSolvents Solvent Fume hood for lithography
EML
  +  
NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
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NANO Vacuum-Oven DiffusionBake Temperature controlled vacuum oven
Red
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TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
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ICL 4-pt-probe MetrologyElectrical Sheet resistance measurement of semiconductors
Red
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ICL 5A-GateOx DiffusionOxidation Diffusion tube for gate oxide growth
Green
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ICL 5B-Anneal DiffusionBake Annealing tube
Green
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ICL 5C-FieldOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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ICL 5D-ThickOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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ICL 6A-nPoly DiffusionCVD Polysilicon deposition tube for n-type poly Si
Green
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ICL 6B-Poly DiffusionCVD Polysilicon deposition tube for p-type poly Si
Green
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ICL 6C-LTO DiffusionCVD Low temperature CVD oxide deposition
Green
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ICL 6D-Nitride DiffusionCVD Deposition of stoichiometric silicon nitride
Green
  +  
ICL AFM MetrologyProfile Atomic Force Microscope for Surface Analysis
Red &Green
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ICL ALD DepositionCVD Atomic Layer Deposition
Red
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ICL cv MetrologyElectrical Electrical characterization of dielectrics
Green
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ICL diesaw PackagingPhysical Wafer dicing saw
Red
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NANO Diesaw-DAD3240 PackagingPhysical Wafer dicing saw
Red
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ICL eBeam-EVO DepositionEvaporate Metal evaporator of CMOS compatible metals
Green
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NANO CMP-GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
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NANO Wirebond-Ball-MEI PackagingPhysical Gold ball bonder for device packaging
Red
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ICL nitrEtch-HotPhos WetAcids Hot phosphoric nitride etch bath
Green
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ICL oxEtch-BOE WetAcids Silicon dioxide etch bath
Green
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ICL P10 MetrologyProfile Stylus profilerometer
Green
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ICL premetal-Piranha WetAcids Piranha resist removal and cleaning station
Green
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ICL rca-ICL DiffusionClean Wafer cleaning before diffusion tubes
Green
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ICL semZeiss MetrologySEM Scanning Electron Microscope
Red &Green
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ICL SM-300 MetrologyThickness Thickness measurement for CMP processing
Red &Green
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ICL TMAH-KOHhood WetAcids Silicon bulk wet etching
Red &Green
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ICL wykoICL MetrologyProfile Optical profiling system
Green
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TRL A1-GateOx DiffusionOxidation Thermal Oxidation for Green Silicon Wafers
Green
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TRL A2-WetOxBond DiffusionOxidation Thermal Oxidation and other thermal process for GREEN Si wafers
Green
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TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
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TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
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TRL acid-hood WetAcids Acid processing station
Red &Green
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TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
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TRL asher-TRL PhotoClean Barrel asher for resist removal
Red &Green
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TRL B1-Au DiffusionOxidation Gold compatible anneal tube
Red
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TRL B2-Ox-alloy-Poly DiffusionOxidation Thermal Oxidation and LPCVD Polysilicon for RED wafers
Green
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TRL B3-DryOx DiffusionOxidation Thermal Oxidation
Green
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TRL B4-Poly DiffusionCVD LPCVD polysilicon for Green wafers
Green
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TRL Balzer-Elionix DepositionSputter SEM or EBL sample preparation
Red
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TRL CCNT DepositionPECVD Carbon nanotube growth
Red
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TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
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TRL dek-NoAu MetrologyProfile Stylus Profilerometer
Green
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TRL dektak-XT MetrologyProfile Stylus Profilerometer
Red
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TRL eBeamAu DepositionEvaporate Metal evaporator
Red
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TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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NANO MaskAlign-SoftLitho-EV620 Photo, SoftLithoExpose, SU8 Contact mask aligner
Red &Green
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TRL EV501 PhotoBond Bonder system to apply heat, vacuum and pressure
Red &Green
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TRL EV620 PhotoBond Aligner for bonding
Red &Green
  +  
TRL EV-LC PhotoExpose Contact mask aligner
Red &Green
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TRL Filmetrics-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL FLX MetrologyProfile Thin film stress measurement
Red &Green
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TRL Greenflo WetAcids Acid processing station
Red &Green
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TRL Hall-probe MetrologyElectrical Carrier measurement
Red
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TRL Heidelberg PhotoExpose Laser direct-write exposure for wafers and masks
Red &Green
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TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
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TRL IV-probe MetrologyElectrical Probe station with curve tracer for IV measurement
Red
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NANO MaskAlign-MA6 PhotoExpose Contact mask aligner
Red &Green
  +  
TRL DirectWrite-MLA150-OptAF PhotoExpose Direct-write lithography for wafers and larger pieces
Red &Green
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TRL DirectWrite-MLA150-AirAF PhotoExpose Direct-write lithography for wafers and larger pieces
Red &Green
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TRL nanospec MetrologyThickness Thin film thickness measurement
Red &Green
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TRL OAI-Flood PhotoExpose Flood exposure for image reversal resists
Red &Green
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TRL parylene DepositionCVD Parylene depopsition
Red
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TRL photo-wet-Au WetSolvents Solvent fume hood with sonicator
Red &Green
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TRL photo-wet-l WetSolvents Wetbench for photoresist development
Red &Green
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TRL photo-wet-r WetSolvents Wetbench for photoresist development
Red &Green
  +  
TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
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TRL PMMAspinner PhotoCoat Manual coater for PMMA and other photoresists
Red &Green
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TRL PZTcoater DepositionSpin-Coat Coater to apply PZT films
Red
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TRL PZTfurnace DepositionBake Bake oven for PZT coated wafers
Red
  +  
TRL rca-TRL DiffusionClean Wafer cleaning before diffusion tubes
Green
  +  
TRL Resonetics PhotoExpose Laser ablation system
Red
  +  
TRL SolventHood-TRL WetSolvents Solvent fume hood
Red &Green
  +  
TRL sts1 EtchDRIE Deep reactive ion etcher for silicon
Red
  +  
TRL SU8spinner PhotoCoat Manual spin-coater for SU8 resists
Purple
  +  
TRL TBM-8 PhotoBond Front-to-back alignement measurement
Red &Green
  +  
TRL UVozone-Au EtchClean Cleans residual organics
Red
  +  
TRL varTemp PhotoBake Bake oven for variable temperature
Red
  +  
TRL WYKO MetrologyProfile Optical profiling system
Red &Green
  +  
TRL XeF2 EtchRIE XeF2 isotropic etching of silicon
Red
  +  
NANO Wirebond-Ball-Westbond PackagingPhysical, LEAP Manual ball bonder
Red
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NANO Wirebond-Wedge PackagingPhysical, LEAP Manual wedge bonder
Red
  +  
NANO XRay-Inspection PackagingPhysical, LEAP X-Ray imaging
Red
  +  
NANO Clean-Ar-Plasma PackagingClean, LEAP Plasma parts cleaning
Red
  +  
NANO Oven-Reflow PackagingBake, LEAP Reflow oven
Red