New Process

Machines by General Keyword: load lock

Tools that have a load-lock, where the user is not required to place the sample directly into the process chamber
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EBL Elionix PhotoExpose Electron beam lithography system
Red &Green
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EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
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NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
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ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
  +  
ICL AME5000 EtchRIE RIE etcher for frontend silicon processes
Green
  +  
ICL pTrack PhotoCoat Automated coater and developer track
Green
  +  
ICL concept1 DepositionPECVD PECVD deposition of oxides, nitrides, and TEOS
Green
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ICL DCVD DepositionPECVD PECVD deposition of oxides, nitrides, and a-Si
Green
  +  
ICL endura DepositionSputter Metal sputter deposition
Green
  +  
ICL epi-Centura DepositionCVD Not open to public
Green
  +  
ICL i-stepper PhotoExpose i-line stepper
Red &Green
  +  
ICL LAM490B EtchRIE Chlorine based plasma etching of silicon
Green
  +  
ICL LAM590-ICL EtchRIE Fluorine based plasma etching of silicon oxide and nitrides
Green
  +  
ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
  +  
ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
  +  
ICL rainbow EtchRIE Chlorine based plasma etcher for metals
Green
  +  
ICL RTA2 DiffusionBake Rapid Thermal Annealing
Green
  +  
ICL RTA-pieces DiffusionBake Rapid Thermal Annealing
Red
  +  
ICL RTP DiffusionBake Rapid Thermal Annealing
Green
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ICL RTP-Si DiffusionBake Rapid Thermal Annealing
Green
  +  
TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
  +  
TRL eBeamFP DepositionEvaporate Fast pumping metal evaporator
Red
  +  
TRL LAM590-TRL EtchRIE Fluorine based plasma etching of oxide and nitrides
Red
  +  
TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
  +  
TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red
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TRL sts1 EtchDRIE Deep reactive ion etcher for silicon
Red
  +  
TRL sts2 EtchDRIE Deep reactive ion etcher for silicon
Green
  +  
TRL sts-CVD DepositionPECVD PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red
  +  
TRL sts-Pegasus EtchDRIE Deep reactive ion etcher for silicon
Red