New Process

Machines by General Keyword: conformal dep

Deposition is primarily conformal
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
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NANO Sputter-Balzer DepositionSputter Thin sputter coating of samples
Red
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EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
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NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
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TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
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ICL 5A-GateOx DiffusionOxidation Diffusion tube for gate oxide growth
Green
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ICL 5B-Anneal DiffusionBake Annealing tube
Green
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ICL 5C-FieldOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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ICL 5D-ThickOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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ICL 6A-nPoly DiffusionCVD Polysilicon deposition tube for n-type poly Si
Green
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ICL 6B-Poly DiffusionCVD Polysilicon deposition tube for p-type poly Si
Green
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ICL 6C-LTO DiffusionCVD Low temperature CVD oxide deposition
Green
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ICL 6D-Nitride DiffusionCVD Deposition of stoichiometric silicon nitride
Green
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ICL ALD DepositionCVD Atomic Layer Deposition
Red
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ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
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ICL pTrack PhotoCoat Automated coater and developer track
Green
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ICL concept1 DepositionPECVD PECVD deposition of oxides, nitrides, and TEOS
Green
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ICL DCVD DepositionPECVD PECVD deposition of oxides, nitrides, and a-Si
Green
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ICL endura DepositionSputter Metal sputter deposition
Green
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ICL epi-Centura DepositionCVD Not open to public
Green
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ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
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ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
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ICL VTR DiffusionCVD Low stress silicon nitride deposition
Green
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TRL A1-GateOx DiffusionOxidation Thermal Oxidation for Green Silicon Wafers
Green
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TRL A2-WetOxBond DiffusionOxidation Thermal Oxidation and other thermal process for GREEN Si wafers
Green
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TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
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TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
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TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
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TRL B1-Au DiffusionOxidation Gold compatible anneal tube
Red
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TRL B2-Ox-alloy-Poly DiffusionOxidation Thermal Oxidation and LPCVD Polysilicon for RED wafers
Green
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TRL B3-DryOx DiffusionOxidation Thermal Oxidation
Green
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TRL B4-Poly DiffusionCVD LPCVD polysilicon for Green wafers
Green
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TRL Balzer-Elionix DepositionSputter SEM or EBL sample preparation
Red
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TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
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TRL HMDS-TRL PhotoBake HMDS oven
Red &Green
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TRL parylene DepositionCVD Parylene depopsition
Red
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TRL PMMAspinner PhotoCoat Manual coater for PMMA and other photoresists
Red &Green
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TRL PZTcoater DepositionSpin-Coat Coater to apply PZT films
Red
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TRL sts-CVD DepositionPECVD PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red
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TRL SU8spinner PhotoCoat Manual spin-coater for SU8 resists
Purple