New Process

Machines by General Keyword: both sides of sample

In these tools, both the wafer front and back sides are processed equally
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
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NANO Asher-SoftLitho Photo, SoftLithoClean, PDMS Oxygen Plasma
Red
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EML hotpress PhotoBond Pressing for thermoplastic films
EML
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EML photo-hood-EML WetSolvents Solvent Fume hood for lithography
EML
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EML SolventHood-EML WetSolvents Solvent Fume hood for lithography
EML
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TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
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ICL 5A-GateOx DiffusionOxidation Diffusion tube for gate oxide growth
Green
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ICL 5B-Anneal DiffusionBake Annealing tube
Green
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ICL 5C-FieldOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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ICL 5D-ThickOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
  +  
ICL 6A-nPoly DiffusionCVD Polysilicon deposition tube for n-type poly Si
Green
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ICL 6B-Poly DiffusionCVD Polysilicon deposition tube for p-type poly Si
Green
  +  
ICL 6C-LTO DiffusionCVD Low temperature CVD oxide deposition
Green
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ICL 6D-Nitride DiffusionCVD Deposition of stoichiometric silicon nitride
Green
  +  
ICL nitrEtch-HotPhos WetAcids Hot phosphoric nitride etch bath
Green
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ICL oxEtch-BOE WetAcids Silicon dioxide etch bath
Green
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ICL premetal-Piranha WetAcids Piranha resist removal and cleaning station
Green
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ICL rca-ICL DiffusionClean Wafer cleaning before diffusion tubes
Green
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ICL TMAH-KOHhood WetAcids Silicon bulk wet etching
Red &Green
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ICL VTR DiffusionCVD Low stress silicon nitride deposition
Green
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TRL A1-GateOx DiffusionOxidation Thermal Oxidation for Green Silicon Wafers
Green
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TRL A2-WetOxBond DiffusionOxidation Thermal Oxidation and other thermal process for GREEN Si wafers
Green
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TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
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TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
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TRL acid-hood WetAcids Acid processing station
Red &Green
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TRL asher-TRL PhotoClean Barrel asher for resist removal
Red &Green
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TRL B1-Au DiffusionOxidation Gold compatible anneal tube
Red
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TRL B2-Ox-alloy-Poly DiffusionOxidation Thermal Oxidation and LPCVD Polysilicon for RED wafers
Green
  +  
TRL B3-DryOx DiffusionOxidation Thermal Oxidation
Green
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TRL B4-Poly DiffusionCVD LPCVD polysilicon for Green wafers
Green
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TRL FLX MetrologyProfile Thin film stress measurement
Red &Green
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TRL Greenflo WetAcids Acid processing station
Red &Green
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TRL HMDS-TRL PhotoBake HMDS oven
Red &Green
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TRL photo-wet-Au WetSolvents Solvent fume hood with sonicator
Red &Green
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TRL photo-wet-l WetSolvents Wetbench for photoresist development
Red &Green
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TRL photo-wet-r WetSolvents Wetbench for photoresist development
Red &Green
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TRL postbake PhotoBake Bake oven 120C
Red &Green
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TRL prebakeovn PhotoBake Bake oven 90C
Red &Green
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TRL PZTfurnace DepositionBake Bake oven for PZT coated wafers
Red
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TRL rca-TRL DiffusionClean Wafer cleaning before diffusion tubes
Green
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TRL SolventHood-TRL WetSolvents Solvent fume hood
Red &Green
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TRL varTemp PhotoBake Bake oven for variable temperature
Red