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Machines by General Keyword: None

Procedures are not tools, but a category where we can collect information about specific themes such as cleaning, metrology, etc. These pages provide more general with links, images, and papers on particular topics rather than particular tools.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
MTL Procedures-Cleaning ProceduresClean Sample Cleaning
Red &Green
MTL Procedures-Deposition ProceduresDeposit Deposition of thin films
Red &Green
MTL Procedures-Etching ProceduresEtch Etching of materials
Red &Green
MTL Procedures-General ProceduresGeneral Broader concepts
Red &Green
MTL Procedures-Lithography ProceduresPhoto Lithography
Red &Green
MTL Procedures-Metrology ProceduresMetrology Test and Measurement
Red &Green
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Other OutsideLab ProceduresGeneral Tools used in outside facilities
Red
  +  
Other CNS ProceduresGeneral Tools used in Harvard CNS
Red
  +  
Other NSL ProceduresGeneral Tools used in NSL bldg 39
Red
  +  
Other SNL ProceduresGeneral Tools used in SNL bldg 37
Red
  +  
NANO Freezer-Packaging PackagingPhysical, LEAP 0
Red
  +  
NANO Interference-LloydsMirror LithoExpose 0
Red &Green
  +  
NANO AIR_Bladecoater NanoMatTBD 0
Red
  +  
NANO AIR_FOM NanoMatTBD 0
Red
  +  
NANO AIR_Spincoater NanoMatTBD 0
Red
  +  
NANO GB_Solar_Sim NanoMatTBD 0
Red
  +  
NANO GB_Spincoater NanoMatTBD 0
Red
  +  
NANO GB_Metals_Evaporator NanoMatTBD 0
Red
  +  
NANO GB_Organics_Evaporator NanoMatTBD 0
Red
  +  
NANO Agilent5500_AFM NanoMatTBD 0
Red
  +  
NANO Cary_UV-Vis_Spec NanoMatTBD 0
Red
  +  
NANO Fluorescence_Spec NanoMatTBD 0
Red
  +  
NANO 4_Point_Probe NanoMatTBD 0
Red
  +  
NANO PECVD-Samco-PD220 DepositionPECVD Silicon dielectric PECVD deposition
Red &Green
  +  
NANO RIE-F-Samco-230iP EtchRIE Fluorine based etcher for silicon dielectrics
Red &Green
  +  
NANO Coldplate-Solvent LithoDevelop Coldplate for PMMA developing
Red &Green
  +  
NANO Hotplate-Tower-U10 LithoBake Hotplate tower for pre- and post-baking, up to 300 mm
Red &Green
  +  
NANO Hotplate-Tower-U12 LithoBake Hotplate tower for pre- and post-baking, up to 150 mm
Red &Green
  +  
NANO Oven-PostBake-U10 LithoBake Oven for 120C postbake of photoresists
Red &Green
  +  
NANO Oven-PostBake-U12 LithoBake Oven for 120C postbake of photoresists
Red &Green
  +  
NANO Oven-PreBake-U10 LithoBake Oven for 97C prebake of photoresists
Red &Green
  +  
NANO Oven-PreBake-U12 LithoBake Oven for 97C prebake of photoresists
Red &Green
  +  
NANO Spinner-AllPurpose LithoCoat All purpose spinner for user-supplied resist and small samples
Red &Green
  +  
NANO Spinner-EBL LithoCoat Spinner for white-light compatible ebeam litho resists PMMA and HSQ
Red &Green
  +  
NANO Spinner-Resist LithoCoat Wafer and large pieces spinner with three plumbed resists
Red &Green
  +  
NANO Develop-L08 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO Develop-U10 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO Develop-U12 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO EBL-Spinner-Hood-U06 LithoCoat Solvent fumehood for EBL coating and sample cleaning
Red &Green
  +  
NANO General-Spinner-Hood-U12 LithoCoat Solvent fumehood for spin coating
Red &Green
  +  
NANO Liftoff-L08 LithoClean General purpose solvent hood and liftoff procedures
Red &Green
  +  
NANO Liftoff-L10 LithoClean General purpose solvent hood and liftoff procedures
Red &Green
  +  
NANO PhotoPrep-L10 LithoTBD Solvent fumehood for general purpose lithography preparation
Red &Green
  +  
NANO Resist-Spinner-Hood-U10 LithoCoat Solvent fumehood for spin coating
Red &Green
  +  
NANO Microscope-Inspect-4k MetrologyInspect Inspection microscope with 4k camera, DIC, darkfield, up to 100x objectives
Red &Green
  +  
NANO Microscope-Inspect-HD MetrologyInspect Inspection microscope with HD camera, up to 100x objectives
Red &Green
  +  
NANO Cleave-LatticeAx MetrologyCleave Aligned sample cleaver for precision indenting and cleaving
Red &Green
  +  
NANO Scribe-Backside MetrologyCleave Sample backside scribing tool
Red &Green
  +  
NANO Scribe-Frontside MetrologyCleave Sample frontside scribing tool
Red &Green
  +  
NANO Microscope-Stereo-Packaging MetrologyPhysical Stereoscope for packaging inspection and work
Red &Green
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NANO Solder-Station PackagingPhysical Solder station for surface mount and rework
Red &Green
  +  
NANO Microscope-Stereo-SU8 SoftLithoSU8, Microscope Stereoscope for placing/peeling/cutting of PDMS
Purple
  +  
NANO Mixer-PDMS-Degas SoftLithoPDMS, Mixer Centrifugal mixer for PDMS
Purple
  +  
NANO Oven-PDMS SoftLithoPDMS, Bake Oven for curing PDMS
Purple
  +  
NANO PDMS-Prep SoftLithoPDMS, Fumehood Fumehood for mixing and casting PDMS
Purple
  +  
NANO SoftLitho-Develop SoftLithoSU8, Fumehood SU8 hood for baking
Purple
  +  
NANO SoftLitho-Prep SoftLithoPDMS, Fumehood Fumehood for cleaning and preparing samples for SU8 and PDMS work
Purple
  +  
NANO Spinner-SU8 SoftLithoSU8, Coat SU8 spin coater with plumbed developer/rinse/ebr
Purple
  +  
NANO SU8-Spinner-Hood SoftLithoSU8, Fumehood Fumehood for SU8 spinning and solvent work
Purple
  +  
NANO SRD-L06 WetClean Spin rinse drier for 4, 6, and 8 inch wafers
Red &Green
  +  
NANO SRD-U10 WetClean Spin rinse drier for 4, 6, and 8 inch wafers
Red &Green
  +  
NANO Acid-Etch-General-U10 WetEtch Acid hood for general purpose acid work
Red &Green
  +  
NANO Acid-Extended-U07 WetEtch Acid hood for longer runs
Red &Green
  +  
NANO Acid-PostCMP-U07 WetClean Acid hood for post-CMP sample cleaning
Red &Green
  +  
NANO Acid-PreClean-U06 WetClean Acid bench for RCA and piranha cleaning of up to 6 inch wafers
Red &Green
  +  
NANO NitrideEtch-Phos-L06 WetEtch Acid bench for etching Si3N4 in hot phosphoric acid
Red &Green
  +  
NANO OxideEtch-HF-BOE-L06 WetEtch Acid bench for etching SiO2 in BOE and HF
Red &Green
  +  
NANO Piranha-L06 WetClean Acid bench for piranha cleaning
Red &Green
  +  
NANO Piranha-U10 WetClean Acid bench for piranha cleaning
Red &Green
  +  
NANO Plating-U04 WetTBD Electroplating wet bench and fume hood
Red &Green
  +  
NANO RCA-Diffusion-L02 WetClean Acid bench for RCA cleaning before diffusion
Red &Green
  +  
NANO RCA-General-L06 WetClean Acid bench for RCA cleaning
Red &Green
  +  
NANO SiliconEtch-KOH-L06 WetEtch Corrosive bench for Si etching with KOH
Red &Green
  +  
NANO Solvent-Clean-U06 WetClean Solvent fumehood for sample cleaning including megasonic and CO2
Red &Green
  +  
NANO Solvent-L06 WetClean Solvent hood for general purpose solvent work
Red &Green
  +  
NANO Ops-ParticleCounter WetClean Particle Counter for staff use
Red &Green
  +  
NANO Computers WetClean Desktop computers in the lab
Red &Green