New Process

Machines by Process Category: Metrology

The metrology tools help you understand what you actually did! Key categories are thin film measurement (e.g. Filmetrics-TRL or in EML [filmetrics]), optical and stylus profiling of surface topology (e.g. WYKO, [dektak], or AFM), and electrical measurements (e.g. IV-probe or parametric-tester). Microscopes, SEMs and specialized measurement equipment (e.g. FLX) round off the toolset.

Some tools can measure similar properties (e.g. thin film thickness in the UV1280, Filmetrics-TRL or nanospec), but different physical principles of operation might make one tool a better choice over the other (e.g. when measuring extremely thin dielectric films, the Filmetrics-TRL while a very easy tool to use, may not be the best choice).

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ProcessLabToolSubcategoryDescription
Color Code
  +  
NANO Dektak-150 Profile, SU8 Surface Profilerometer
Red
  +  
NANO Filmetrics-F20 Thickness Thin Film Optical Measurement
Red &Green
  +  
EML parametric-tester Electrical Probe station for electrical measurements
EML
  +  
NANO SEM-Neo SEM Very Basic Electron Microscope
Red
  +  
ICL 4-pt-probe Electrical Sheet resistance measurement of semiconductors
Red
  +  
ICL AFM Profile Atomic Force Microscope for Surface Analysis
Red &Green
  +  
ICL cv Electrical Electrical characterization of dielectrics
Green
  +  
ICL P10 Profile Stylus profilerometer
Green
  +  
ICL semZeiss SEM Scanning Electron Microscope
Red &Green
  +  
ICL SM-300 Thickness Thickness measurement for CMP processing
Red &Green
  +  
ICL UV1280 Thickness Thin film characterization
Green
  +  
ICL wykoICL Profile Optical profiling system
Green
  +  
TRL dek-NoAu Profile Stylus Profilerometer
Green
  +  
TRL dektak-XT Profile Stylus Profilerometer
Red
  +  
TRL ellipsometer-TRL Thickness Thin film thickness measurement
Red &Green
  +  
TRL Filmetrics-TRL Thickness Thin film thickness measurement
Red &Green
  +  
TRL FLX Profile Thin film stress measurement
Red &Green
  +  
TRL Hall-probe Electrical Carrier measurement
Red
  +  
TRL IV-probe Electrical Probe station with curve tracer for IV measurement
Red
  +  
TRL nanospec Thickness Thin film thickness measurement
Red &Green
  +  
TRL WYKO Profile Optical profiling system
Red &Green
  +  
NANO Microscope-Inspect-4k Inspect Inspection microscope with 4k camera, DIC, darkfield, up to 100x objectives
Red &Green
  +  
NANO Microscope-Inspect-HD Inspect Inspection microscope with HD camera, up to 100x objectives
Red &Green
  +  
NANO Cleave-LatticeAx Cleave Aligned sample cleaver for precision indenting and cleaving
Red &Green
  +  
NANO Scribe-Backside Cleave Sample backside scribing tool
Red &Green
  +  
NANO Scribe-Frontside Cleave Sample frontside scribing tool
Red &Green
  +  
NANO Microscope-Stereo-Packaging Physical Stereoscope for packaging inspection and work
Red &Green