New Process

Machines by Process Category: Diffusion

The furnaces in TRL and ICL can be used for high temperature annealing, diffusion, oxidation, and LPCVD. Because of the high temperatures involved, tubes are separated by samples cleanliness level (RED vs GREEN), and most of the time require an RCA clean to make sure no contamination enters the tube.
View All

ProcessLabToolSubcategoryDescription
Color Code
  +  
NANO Anneal-Tube Bake Anneal Furnace
Red
  +  
NANO Anneal-Box Bake Anneal Furnace
Red
  +  
NANO Ox-Tube-Lindberg Oxidation Oxidation Furnace
EML
  +  
NANO RTA-900C Bake Rapid Thermal Annealing
Red
  +  
NANO Vacuum-Oven Bake Temperature controlled vacuum oven
Red
  +  
ICL 5A-GateOx Oxidation Diffusion tube for gate oxide growth
Green
  +  
ICL 5B-Anneal Bake Annealing tube
Green
  +  
ICL 5C-FieldOx Oxidation Diffusion tube for wet oxide growth of thicker films
Green
  +  
ICL 5D-ThickOx Oxidation Diffusion tube for wet oxide growth of thicker films
Green
  +  
ICL 6A-nPoly CVD Polysilicon deposition tube for n-type poly Si
Green
  +  
ICL 6B-Poly CVD Polysilicon deposition tube for p-type poly Si
Green
  +  
ICL 6C-LTO CVD Low temperature CVD oxide deposition
Green
  +  
ICL 6D-Nitride CVD Deposition of stoichiometric silicon nitride
Green
  +  
ICL rca-ICL Clean Wafer cleaning before diffusion tubes
Green
  +  
ICL RTA2 Bake Rapid Thermal Annealing
Green
  +  
ICL RTA-pieces Bake Rapid Thermal Annealing
Red
  +  
ICL RTP Bake Rapid Thermal Annealing
Green
  +  
ICL RTP-Si Bake Rapid Thermal Annealing
Green
  +  
ICL VTR CVD Low stress silicon nitride deposition
Green
  +  
TRL A1-GateOx Oxidation Thermal Oxidation for Green Silicon Wafers
Green
  +  
TRL A2-WetOxBond Oxidation Thermal Oxidation and other thermal process for GREEN Si wafers
Green
  +  
TRL A3-Sinter Bake Sintering for GREEN Si wafers
Green
  +  
TRL A4-III-Vanneal Bake Annealing for GREEN III-V samples
Red
  +  
TRL B1-Au Oxidation Gold compatible anneal tube
Red
  +  
TRL B2-Ox-alloy-Poly Oxidation Thermal Oxidation and LPCVD Polysilicon for RED wafers
Green
  +  
TRL B3-DryOx Oxidation Thermal Oxidation
Green
  +  
TRL B4-Poly CVD LPCVD polysilicon for Green wafers
Green
  +  
TRL rca-TRL Clean Wafer cleaning before diffusion tubes
Green
  +  
TRL RTA-HiT Bake Rapid Thermal Annealing
Red